The P.I.s propose the acquisition of a scanning electron microscope with an EDS x-ray detection system, stage and electron optical column automation, image acquisition, processing and electron beam lithography software. Specifically, a JEOL JSM 6400 SEM and Link Analytical eXL analyzer and LZ4 Si(Li) detector, stage and beam automation hardware and software are requested. The microscope will be used by a number of engineering research programs in materials science, microelectronics and tribology. Additional uses will be in biomedical engineering and related fields. The microscope will be housed in and operated by the Rippel Electron Microscope Facility at Dartmouth College. Facility personnel will train others in the use and care of the microscope and will oversee appropriate use of the microscope.
