The project will investigate the physical principle underlying the plasma-assisted laser deposition process for the in situ growth of high critical temperature superconducting thin films on a substrate. An understanding of the physical mechanisms governing the process are critical for reproducible thin film deposition on a low temperature substrate and subsequent integration into existing semiconductor technologies. The successful modeling and control of the deposition process may allow the manufacture of superconducting thin films with the consistent properties that are needed to produce devices that are of practical usefulness.

Project Start
Project End
Budget Start
1992-09-01
Budget End
1996-05-31
Support Year
Fiscal Year
1992
Total Cost
$100,000
Indirect Cost
Name
University of South Florida
Department
Type
DUNS #
City
Tampa
State
FL
Country
United States
Zip Code
33612