This work attempts to actively engage the academic community in Engineering Metrology, an area vital to manufacturing. Engineering Metrology forms the backbone of interchangeable manufacturing. This characteristic combined with an increasing need to manufacture to tighter tolerances, in the recent past, dictates that a scientific approach to the issues that impact this area is needed. Projects that will be addressed include development of methodologies for ultra-high accuracy two dimensional stage metrology for lithography applications, basic work in engineering metrology for threads, and development of calibration procedures, methods and standards for atomic scale measurement instruments. This work is critical to a variety of industries in the manufacturing sector. The problems to be addressed in this research includes the mechanical and micro-electronic industries. The results of this work will provide leading edge technology to these industries and enhance their competitiveness.

Agency
National Science Foundation (NSF)
Institute
Division of Civil, Mechanical, and Manufacturing Innovation (CMMI)
Application #
9215792
Program Officer
Ming C. Leu
Project Start
Project End
Budget Start
1993-03-01
Budget End
1997-08-31
Support Year
Fiscal Year
1992
Total Cost
$620,000
Indirect Cost
Name
University of North Carolina at Charlotte
Department
Type
DUNS #
City
Charlotte
State
NC
Country
United States
Zip Code
28223