Mukherjee 9622114 Electronic and optical thin film production currently relies on techniques such as molecular beam epitaxy (MBE), chemical vapor deposition, sputtering, liquid phase epitaxy, ion beam deposition, and thermal evaporation. The research is to study the interaction of the CO2 laser with the target as well as the effect of inter-pluse delay of the temporal shaping on the coupling of the CO2 laser energy to the excimer laser-ablated plume. Both theorical and experimental models will be studied to optimize the process parameters. To assess the flexibility of the proposed dual-laser process as a manufacturing method, three diferent materials, including Lithium Niobate, High Temperature Superconductor, and Amorphous rare earth-transition metal alloys will be investigated. The outcome of this research project would allow the development of a database for the general applicability of this technique, thus the realization of the use of pulsed laser deposition (PLD) for manufacturing could be achieved. The outcomes of the study would yield useful tools and models to develop a novel manufacturing technique which combine the merits of molecular epitaxy technology and single source deposition

Agency
National Science Foundation (NSF)
Institute
Division of Civil, Mechanical, and Manufacturing Innovation (CMMI)
Application #
9622114
Program Officer
Delcie R. Durham
Project Start
Project End
Budget Start
1996-12-01
Budget End
2000-11-30
Support Year
Fiscal Year
1996
Total Cost
$258,735
Indirect Cost
Name
University of South Florida
Department
Type
DUNS #
City
Tampa
State
FL
Country
United States
Zip Code
33612