9703426 Zhang Microelectromechanical System (MEMS) presents a challenge in fabrication of truly three-dimensional (3D) and high aspect ration microstructures. Conventional IC-based approaches can not deliver a feasible solution to this challenge due to its planar nature. This research project studies a novel non-IC laser-based technology for 3D high aspect ration microstructures through micromachining. A novel doping technique to achieve ultra-shallow micromachining of 10-20nm in depth for CD-ROM will be investigated. The outcomes of the research could generate an array of opportunities in the areas of optical data storage and bio-medical engineering. The research activities will be balanced by an education plan to improve the quality of graduate and undergraduate education at the Pennsylvania State University.
