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Plasma Oxidation of Silicon (Materials Research)
Reisman, Arnold
North Carolina State University Raleigh, Raleigh, NC, United States
Search 6 grants from Arnold Reisman
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Abstract
Funding Agency
Agency
National Science Foundation (NSF)
Institute
Division of Materials Research (DMR)
Application #
8502388
Program Officer
John C. Hurt
Project Start
Project End
Budget Start
1985-07-01
Budget End
1989-06-30
Support Year
Fiscal Year
1985
Total Cost
$280,000
Indirect Cost
Institution
Name
North Carolina State University Raleigh
Department
Type
DUNS #
City
Raleigh
State
NC
Country
United States
Zip Code
27695
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