Recent technical advances in computer hardware and sensitive electron array detectors have made it possible to examine the structure of extremely small volumes of material. Unequivocal structural information on such volumes cannot be obtained by conventional means. This research will develop techniques for the determination of the structure of nanometer size regions using advanced equipment. In addition modifications to the theory of electron diffraction from such regions will be developed as necessary. The research will be conducted cooperatively between Arizona State University and Exxon Chemical Company.