This instrument with combined ultra-high resolution (UHR) imaging and nano-probe microanalytical capabilities will strengthen and enhance ongoing and future research programs on semiconductors, (electro-optical materials), ceramics, intermetallics and superconductors at North Carolina State University at Raleigh. The microscope will operate at a maximum voltage of 200kV with point-to-point resolution of 0.18nm. An image acquisition system combined with appropriate digitizing and processing computer hardware/software will be interfaced directly with the high-resolution microscope. Further, this computer will be interfaced with the departmental VAX 11/750 to allow up and down loading of digitized experimental images for a detailed comparison with theoretically-calculated high resolution images.