This research project consists of a study of several types of ion-solid interactions and their application to the characterization, analysis, and processing of advanced electronic and photonic materials. Million electron volt ion implantation will be utilized in the fabrication of high performance single mode solid state lasers. Studies will be conducted to understand at a fundamental level the ion-solid processes involved, and the causes of ion implantation induced changes in optical and electrical properties in III-V semiconductor materials. Additionally, heavy-ion Rutherford backscattering with time-of- flight detection will be further developed to solve the current problem of quantitative analysis of particular III-V material combinations such as Indium in Indium Gallium Arsenide and Indium Gallium Nitride. Certain aspects of sputtering and related processes are also included as part of this research effort to provide greater understanding of materials and processing fundamentals important to the fabrication of high performance electronic and photonic devices and circuits.

Agency
National Science Foundation (NSF)
Institute
Division of Materials Research (DMR)
Application #
9011230
Program Officer
LaVerne D. Hess
Project Start
Project End
Budget Start
1991-02-01
Budget End
1994-04-30
Support Year
Fiscal Year
1990
Total Cost
$326,858
Indirect Cost
Name
California Institute of Technology
Department
Type
DUNS #
City
Pasadena
State
CA
Country
United States
Zip Code
91125