A variable-temperature scanning tunneling microscope (STM) with the capability of studying the chemistry of electronic material design and its application to nano-device fabrication will be acquired with the Academic Research Infrastructure Program funds. The JEOL STM instrument will operate between 30K and 1500K. The research will emphasize deposition and growth reactions involving silanes and chlorosilanes in an effort to elucidate the role of hydrogen and chlorine atoms produced by the growth precursors. The variable-temperature capability will play an important role in the study of adsorption, diffusion and growth reactions. The catalytic role of atomic hydrogen in promoting ordered crystalline growth in electronic materials. Various approaches will be considered in efforts to fabricate controllably doped diode nanostructures and quantum dots. A variable-temperature scanning tunneling microscope will be utilized in the study of the chemistry of electronic material design and its application to nanoscale device fabrication. The role of atomic hydrogen and chlorine in the growth processes will be studied. Adsorption, diffusion, and growth reaction studies will be carried out versus temperature. Efforts will be made to fabricate nanoscale devices.
