9707489 Galloway This RPG proposal requests funds for assisting the PI to diversify her interests towards thin film synthesis and analysis of scientifically challenging and technologically important microelectronic materials. She will investigate TiN films with respect to potential applications in microelectronics. TiN film growth by Dual Ion Beam Sputtering(DIBS) will be used to integrate TiN as a diffusion barrier and conductive layer with other materials. The project will be conducted in collaboration with researchers at Lucent Technologies. %%% The project addresses materials science and engineering research issues in a topical area of materials science having high technological relevance. The research will contribute basic materials science knowledge at a fundamental level to important aspects of electronic/photonic devices and integrated circuits. Additionally, the fundamental knowledge and understanding gained from the research is expected to contribute to improving the performance of advanced devices by providing a fundamental understanding and a basis for designing and producing improved materials. ***
