9720491 Amato-Wierda This project aims to introduce a complementary line of inquiry in the area of gas-phase chemistry of plasma enhanced chemical vapor deposition (PECVD) to the PI's research program through analysis of the gas-phase composition during PECVD by molecular beam mass spectrometry (MBMS). The gas-phase neutral, ion, and radical species, as well as their kinetics and mechanisms, will be correlated with process variables and final film properties. The project is co-supported by the Division of Materials Research, and the MPS OMA(Office of Multidisciplinary Activities). %%% This is a research enhancement grant made under the Professional Opportunities for Women in Research and Education (POWRE) program. The research will contribute basic materials science knowledge at a fundamental level of special relevance to the synthesis and processing of electronic materials. ***
