NSF support of $5000 is requested for student participation at the 2000 International Conference Characterization and Metrology for ULSI Technology. This Conference will be held at NIST, Gaithersburg, MD, June 26-29, 2000. It continues a sequence of two highly successful conferences held in 1995 and 1998, each of which led to a formidable Proceedings book published by the AIP Press. The funds will support student travel and registration for about 20 students who will be making presentations and submitting papers for the Conference Proceeings. The Semiconductor Research Corporation (SRC) and the American Vacuum Society (AVS) are also contributing funds toward student support ($5K from SRC, $2K from AVS).