Research Objectives and Approaches: The objective of this research is to enable the highest level nanoscale research within the entire north Texas region. The approach is to acquire a Raith e-LiNE Plus E-Beam Lithography (EBL) tool. It will be placed in the UTD Cleanroom Research Laboratory (CRL) to provide advanced lithographic capabilities. There is no EBL capability in north Texas to facilitate university and corporate research.
Intellectual Merit: This EBL tool will accelerate existing research and enable new research avenues in an astonishing array of fields. Example areas enhanced include: Nanoscale Electronic Devices, Sensors, Manufacturing, Materials, and Photonics. Many researchers will be enabled by this EBL tool combined with the capabilities already resident in the CRL. The CRL has a large and growing user base (>210) and the capability to make this EBL tool productive in the long term. UTD faculty and staff, together with colleagues throughout north Texas have the funding and expertise to make the most of this capability.
Broader Impacts: The EBL acquisition will enhance a broad range of activities, people, research areas, and institutions. It will enhance research and education in the CRL including a variety of classes in multiple disciplines, both graduate and undergraduate (crucial to UTD?s teaching mission). In addition, it will enhance the training of high school students through summer research programs. All nanoscale research can be enhanced and it will foster new industrial collaborations. It will enable the researchers of numerous major universities and companies throughout north Texas and beyond.
The objective of this NSF research was to enable the highest level nanoscale research within the entire north Texas region. The approach was initially to acquire a Raith e-LiNE Plus E-Beam Lithography (EBL) tool and place it in the UTD Cleanroom Research Laboratory (CRL) to provide advanced lithographic capabilities. There used to be no EBL capability in north Texas to facilitate either university or corporate research. After receiving the grant, we successfully acquired a Raith 150-Two EBL tool, which is significantly better than the originally envisioned tool. It is now installed in the UTD cleanroom for use by researchers in the entire North Teas region. This tool easily passed the qualification tests by demonstrating outstanding nanopatterning capabilities. For examples: it has sub-10 nm resolution, 16 nm field stitching accuracy and 18 nm overlay alignment accuracy, etc. This lithography capability will definitely accelerate existing research and enable new research avenues in an astonishing array of fields. Examples of research areas to be enhanced include: Nanoscale Electronic Devices, Sensors, Manufacturing, Materials, and Photonics. A comprehensive management plan is established to manage and maintain the tool for all users. Therefore, we have accomplished the proposed tasks outlined in this NSF MRI proposal. We believe the establishment of this critical infrastructure will generate considerable broader impacts for the future. It will enhance research and education in the CRL including a variety of classes in multiple disciplines, both graduate and undergraduate. In addition, it will enhance the training of high school students through summer research programs. All nanoscale research can be enhanced and it will foster new industrial collaborations. It will enhance the research capabilities of scientists and engineers at both universities and companies throughout north Texas and beyond.
