The objectives of this research are to provide a better understanding of liquid metal ion source emission processes (ions & clusters) and development of the fine-focused cluster beam technique as a tool for patterned thin film deposition. These objectives will be realized through completion of a set of experiments. In addition, a model is developed for operation of these sources in cluster dominated emission mode. These experiments are designed to provide experimental data to verify the model and to develop the focused ion cluster beam technique as a finely focused thin film deposition process. The proposed model is based on the hydrodynamic instability of the liquid metal under electric field stress. This model is consistent with the experimental observation and with measurement reported in the literature.
