The miniaturization of electronics has had, and is continuing to have, a profound influence on society. A similar miniaturization in mechanical systems appears to be underway with potentially equal significance to society. Initially used to fabricate solid-state sensors, anisotropic etching of silicon provides the ability to fabricate complete micromechanical systems--actuators, components, and sensors--in the same way microelectronic devices are manufactured. Further development of micromechanical systems will require the skills from and interaction amongst a number of disciplines. This proposal covers the conduct of a series of workshops on micromechanical systems, bringing together experts from different disciplines to recommend fruitful areas for research and to provide a focus for future developments and applications. The first meeting of the workshop series will prepare a preliminary report by August, 1987, with a final report following the third and final meeting in January, 1988.
