Abstract

This grant will allow purchase of a reactive ion etcher for III-V device processing.

  Funding Agency

Agency
National Science Foundation (NSF)
Institute
Division of Electrical, Communications and Cyber Systems (ECCS)
Type
Standard Grant (Standard)
Application #
8906137
Program Officer
Arthur R. Bergen
Project Start
Project End
Budget Start
1989-05-15
Budget End
1990-10-31
Support Year
Fiscal Year
1989
Total Cost
$45,450
Indirect Cost

  Institution

Name
University of Minnesota Twin Cities
Department
Type
DUNS #
City
Minneapolis
State
MN
Country
United States
Zip Code
55455