This research aims to develop and demonstrate surface microstructures that allow the control of inter-component clearances in micromechanisms. These self-assembling microstructures (SAMS) operate by moving elements in the plane of the substrate both to eliminate undesirable clearances and to provide controlled pre-load forces. A fabrication process is proposed that builds in prescribed bending moments to actuate flexures upon release from the substrate. Interdigitated fingers are used to generate electrostatic forces for component assembly by local resistive heating. A four-pawl resonant micromotor is proposed as a research vehicle for demonstrating SAMS concepts in a microdynamic system.
