The proposed research is intended to exploit opportunities recognized in the development of the LIGA process for fabrication of microelectromechanical systems (MEMS). Direction is provided by potential commercial technology transfer, including improved MEMS for sensors and the creation of new classes of devices. A significant portion of the proposed research is in magnetics technology for MEMS. Design methods and constraints will be analyzed via electroplated magnetic structures. A cell designed linear magnetic actuator will be the primary test vehicle. The emphasis will involve output force per unit chip area considerations, speed and positional accuracy, as well as control electronics. Rotating magnetic motors will be constructed with compatible gear boxes. New microsensors such as magnetic proximity sensors will also be investigated.
