Research is proposed on three relatively low cost and manufacturable technologies for microelectromechanical systems (MEMS), which will contribute toward enabling commercial development of these systems. The first technology is a process for integrating optical-quality compound semiconductor materials onto silicon- based microstructures. This technology, which is based on a modification of epitaxial liftoff techniques for compound semiconductor materials, will enable the development of integrated optically- based sensors and actuators. The second technology involves the use of electroplating techniques coupled with polyimide-based electroplating forms to produce a low-cost alternative to the LIGA process for fabrication of high-aspect-ration microstructures. The third technology involves the design and fabrication of simple solar cell structures that can be used as self- contained power sources for MEMS. The solar cell structures will be optimized for the high-voltage, low-current needs of electrostatic microactuators, and designed such that they can be integrated directly with standard silicon-based microstructures.
