The goals of the proposed research are to develop key technologies in the fields of epitaxial growth of low-dimensional nanostructures by molecular beam epitaxy and materials processing to make possible the fabrication and characterization of functional nanodevices with dimensions smaller than existing devices. It is expected that this dimensionality will lead to the observation of new quantum and ballistic effects which will in turn lead to novel devices with higher performance and operation above liquid nitrogen temperatures. It is our vision that the completion of this research should lead to 1) new insight into innovative growth and regrowth methods, 2) new insight into characterizing ultra-small heterolayers and interfaces 3) more advanced nanofabrication technologies, 4) an understanding of new physical effects in nanoscale structures and devices, 5) improved and innovative nanodevices.