This grant is for support of the 36th International Symposium on Electron, Ion and Photon Beams, Orlando, FL, May 26-29, 1992. This long-standing annual symposium is considered the premier conference for the fields of nano- and micro- fabrication, x-ray, electron and ion lithoqraphies and particle beam optics. This request and previous years support by NSF has been intended to enable graduate students who are working in these fields to attend the meeting and present their work. Because this is an important enabling technology for the microelectronics and other high-tech industries, and the requested use of NSF funds for graduate student support will be very effective in enhancing the base of trained researchers in these fields.
