This is an NSF Young Investigator award. The PI's research will focus in the area of solid-state and actuators and integrated circuits, as a means to stable, high- performance peripherals for electronic systems and development of fully integrated sensing/actuating systems. The specific research area of focus will be microelectromechanical systems for high- performance sensing and actuation devices, fabrication technologies for microstructure formation and for sensor-actuator-circuit integration, design of high-performance interface electronics, and definition of high- performance packaging techniques. Application areas for this research will include implantable biomedical senors and actuators, and sensors and actuators for transportation systems, avionics, instrumentation, and other systems.

Agency
National Science Foundation (NSF)
Institute
Division of Electrical, Communications and Cyber Systems (ECCS)
Application #
9257400
Program Officer
Rajinder P. Khosla
Project Start
Project End
Budget Start
1992-09-01
Budget End
1998-08-31
Support Year
Fiscal Year
1992
Total Cost
$275,000
Indirect Cost
Name
University of Michigan Ann Arbor
Department
Type
DUNS #
City
Ann Arbor
State
MI
Country
United States
Zip Code
48109