This is an NSF Young Investigator award. The PI's research will focus in the area of solid-state and actuators and integrated circuits, as a means to stable, high- performance peripherals for electronic systems and development of fully integrated sensing/actuating systems. The specific research area of focus will be microelectromechanical systems for high- performance sensing and actuation devices, fabrication technologies for microstructure formation and for sensor-actuator-circuit integration, design of high-performance interface electronics, and definition of high- performance packaging techniques. Application areas for this research will include implantable biomedical senors and actuators, and sensors and actuators for transportation systems, avionics, instrumentation, and other systems.