9502046 Kenny This is a CAREER award which emphasizes the combined aspects of research and education in the area of MicroElectroMechanical Structures (MEMS). Particular emphasis will be placed in the research program on an improved understanding of micromechanical properties with experiments conducted over a wide temperature range on phonon (thermal) transport in confined geometries and acoustic wave transmission through isolated microstructures. The materials employed will be amorphous, polycrystal-line and single-crystal microstructures. The teaching program will involve both undergraduate and graduate courses in MEMS with particular emphasis on development of a new micromechanical systems course. ***
