9553202 Si This project will establish a joint research and education program between Arizona State University and Motorola. This project will iteratively develop and test novel general-purpose designs for control and systems modeling, based on adaptive critics (approximate dynamic programming) and recurrent neural networks. For testing and evaluation, it will focus on the modeling and run-to-run control of the Reactive Ion Etching process. A new course will be developed in electrical engineering curriculum on fundamental signal analysis and control applications to semiconductor manufacturing.
