9624882 He Semiconductor optoelectronic devices, such as laser diodes, light emitting diodes, optical waveguides, electrooptic modulators, and photodetectors, have important applications in optical communication and control systems because of their convenience, efficiency, and natural compatibility with modern electronics. Research on high performance semiconductor photodetectors using low temperature (LT) deposition technology is proposed for the PI's career development plan. The PI's current research focuses on the study of the microstructural and electrical properties of LT thin metal films. The most important characteristics of the low-temperature deposited thin metal films, compared with conventional room temperature deposited films, are: (1) tremendously increased Schottky barrier height; and (2) greatly lowered resistivity when they are very thin (less than 100 A); both of which are superior qualities for many optoelectronic devices, such as a metal semiconductor-metal (MSM) photodiode, which is one of the best choices for high-speed photodetectors. The proposed research plan is to (1) explore the electrical characteristics of LT thin films on several new semiconductor materials, including InGaAs, AlGaAs and SiGe, which are often used for photodetectors; (2) implement this technique to device fabrication; (3) optimize device design; and (4) carry out the device fabrication and characterization. It is anticipated that the application of the low-temperature thin metal films will result in a significant enhancement of device performance. Such a high-performance photodetector will have an important impact in optoelectronic integrated circuit (OEIC) technology. The goal of the PI's education plan is to educate productive engineers for today's industrial and academic needs and to provide newly developed technology to aid students' professional development. Concurrently with the PI's research program, two senior elective and graduate level courses in optoelectro nic devices, as well as semiconductor material and device characterization are being developed by the PI in the Department of Electrical Engineering at Northern Illinois University. Innovation in these courses will focus on the development of laboratory components for both courses, which will provide a strong synergy between the PI's research program and education goals. ***
