The Engineering Research Center for Advanced Electronic Materials Processing at North Carolina State University will develop processing technology for the generation of electronic devices that will be produced in the next century. Specifically, the ERC is planning to develop atomic layer processing technology and low temperature processes compatible with an in-situ processing system. The research areas that will be addressed are plasma processing; laser and optically assisted processing; atomic layer and molecular beam epitaxy; electron and ion beam processing and the development of special characterization techniques to monitor and control an in-situ processing system. Modelling and simulation of the processes are planned as is the development of expert systems for process control. Dr. Nino Masnari, Chairman of the electrical Engineering Department will be the Director of the Center.
