This award of $390,000, to the University of Michigan, Ann Arbor, is for the development of an integrated research program on the real-time control of semiconductor manufacturing processes and for the integration of such research into new curricula. The effort will improve the capabilities of semiconductor manufacturing tools to produce consistent, uniform high-yield wafers through the application of real-time and run-to-run feedback and feedforward control. It will also create a new academic program for the training of advanced undergraduate and graduate students in this important area.
