This project focuses on the development of a set of undergraduate laboratory courses in microelectronics processing. These courses complement the extensive collection of lecture classes in microelectronics by providing hands-on experience for the students. The first quarter course concentrates on experiments to teach the steps of device fabrication such as photoresist, etching and oxidation. The second quarter course allows deeper investigation of the scientific details of fabrication. Given that progress in microelectronics has historically been a result of strong interdisciplinary activity, the course will be offered to students in physics, chemistry, chemical engineering, electrical engineering, and materials engineering. This project is significant because it will introduce the microelectronic device fabrication process to undergraduates early in their academic life through hands-on laboratory experimentation.
