9703934 Maxwell The International Research Fellow Awards Program enables U.S. scientists and engineers to conduct three to twenty four months of research abroad. The program's awards provide opportunities for joint research, and the use of unique or complementary facilities, expertise and experimental conditions abroad. This award will support a six-month postdoctoral research visit by Dr. James L. Maxwell of Louisiana Tech University to work with Dr. Mats Boman at Uppsala University in Sweden. This project involves the study of laser-induced chemical vapor deposition (LCVD) and, in particular, the use of LCVD to manufacture three-dimensional micro electro mechanical systems (MEMS). Few traditional micromachining processes are capable of producing highly-three-dimensional MEMS devices. Three-dimensional LCVD (3D-LCVD) is a mode of pyrolytic vapor deposition where high-aspect ratio microstructures can be generated. Using 3D-LCVD, the researchers plan to fabricate a three-dimensional micro- inductor, a superconducting micro-inductor, and coils which will be used to test the feasibility of laser-deposited Ni- Ti shapememory actuators in MEMS devices. Dr. Boman was the first to produce complex shapes and useful devices via 3D- LCVD and Dr. Maxwell was the first to demonstrate feedback control of growth rates during 3D-LCVD which allows precise, continual control of layered and freeform growth. The University of Uppsala has the best equipped laboratory for 3D-LCVD in the world. ***
