Dr. Odom and his colleagues at Charles Evans and Associates recently completed a Phase I study to evaluate the feasibility of laser mass spectrometry providing quantitative and qualitative elemental and molecular microanalysis of thin dielectric films. The research in the Phase II study will involve preparation and characterization of thin film standards, enhancement of the linear dynamic range of the ion detection system and qualitative and quantitative analytical investigations. The technique, if successful, will have a major impact on the fabrication and characterization of thin film devices.
