The objective of this SBIR Phase I award is to support the development of a non-invasive method of precisely sensing surface temperature in the range 600 to 1200 degrees Centigrade acutely needed to support development of "expert" Metalorganic chemical vapor deposition systems. A wireless system based upon remote detection of the temperature dependent gamma ray flux from trace radionuclides buried in the heated surface will be studied. The proposed approach will induce minute quantities of near-surface gamma activity at the site to be monitored, then remotely sense decreases in photon flux due to evaporation. Multi-point measurements yielding temperature uniformity should be feasible.