This research will evaluate a new soft X-ray optic (a Soft X-ray Diffraction Plate, SXDP) which is analogous to a diffuser in the visible. Because it can eliminate condenser optics and increase photon flux, it will be a useful optic wherever optical constants make refractive and reflective optical elements difficult. The first application, in Phase II, will be to improve imaging soft X-ray microscopy (ISXM), making such microscopes more robust and commercially viable instruments. We anticipate further applications will develop in areas where uniformity of illumination and preservation of flux are crucial. X-ray spectroscopy of inhomogeneous sources and projection soft X-ray lithography will be among the first to benefit. The SXDP consists of an opaque film with a multitude of small holes, whose size is comparable to the wavelength of the X-rays. This novel X-ray optic may improve flux through ISXMs by an order of magnitude and provide good numerical aperture matching. This optic will contribute to the commercial development of a compact ISXM. In Phase I, SXDP models, using analytical and computer techniques, will decide which manufacturing method will produce optimum SXDPs and evaluate their performance by comparing data with theory.
