This award provides support to analyze a new micromechanical structure for the precision measurement of acceleration. The device utilizes a high Q silicon resonator incorporated into the silicon hinge of a monolithic silicon accelerometer. Resonators have the potential of offering truly exceptional stability at very low cost and with only minor additional processing complexity over what is needed currently. Resonant beam structures have been fabricated for a number of pressure sensor applications to demonstrate experimental feasibility. This work build upon the pressure sensing technology to create a self- contained silicon accelerometer structure.
