Single and multicomponent oxides of high purity and nanometer particle sizes will be prepared using vapor phase reaction process. In Phase I, the reaction and particle formation mechanisms will be simulated to relate particle size and surface composition to mixing geometries, gas phase compositions and temperatures. Limited experimental work will be performed to prepared several grams of a metal oxides material for particle size analysis and surface chemistry investigations. High purity single and multicomponent oxides in the nanometer size range have potential applications in catalysis and other advanced materials such as ceramics.