9360430 Williford A new technology is proposed to adjust the velocity of sprays or jets of solvent, in order to augment the ability of the resulted droplets to transfer momentum to particulate contamination on surfaces. Submicron contamination, otherwise difficult to remove is emphasized. Carbon dioxide sprays will be used in this research as replacements for CFC solvent now being phased out of use. In addition to meeting environmental demands of the Clear Air Act of 1990, this replacement technology shows promise of improved performance and operating economics. The research has application to cleaning of silicon wafers and semiconductors devices, other cleanroom components, hard drives and information storage disks, drums for printing engines, and photocopiers. ***
