The overall objective of this Small Business Technology Transfer (SBIR) Phase I research project is to fabricate, demonstrate, and characterize a high resolution, high efficient imaging time-of-flight nanoprobe which uses high repletion femtosecond postionization techniques. Successful completion of this new instrument will make it possible to quantify the spatial distribution of atomic and molecular species in semiconductors, optical fibers, biological specimens, environmental and others samples, to subfemtomole concentration levels.