EEC-9527545 Muller This award is to establish a cooperative/collaborative research program between The Pennsylvania State University Center for Dielectric Studies Industry/University Cooperative Research Center and the University of California at Berkeley Sensor and Actuator Industry/University Cooperative Research Center in the area of lead zirconate titanate dielectrics for microelectromechanical devices. The center at the University of California is working on surface micromachined devices and the design of microsystems and components. The center at The Pennsylvania State University is working on the physics of thin-film dielectric, piezoelectric and ferroelectric materials. In this program the institutions are sharing expertise and facilities with the goal of improving the performance of piezoelectrically-activated microdevices through the implementation of highly active piezoelectric films in microelectromechanical devices.

Project Start
Project End
Budget Start
1995-09-01
Budget End
1998-02-28
Support Year
Fiscal Year
1995
Total Cost
$50,000
Indirect Cost
Name
University of California Berkeley
Department
Type
DUNS #
City
Berkeley
State
CA
Country
United States
Zip Code
94704