*** 9760219 Jue This Small Business Innovation Research (SBIR) Phase I project addresses novel pressure sensors for deep sea applications. State-of-the-art pressure sensors are either (1) piezoresistive, (2) capacitive, or (3) piezoelectric. The first two classes require an energy source for signal generation, and piezo-type sensors require temperature compensation. Further, the signal usually is linear over only a narrow range. The new pressure sensor does not require an energy source, the signal is linear over a large pressure range, and it is temperature independent. Although deep sea application is targeted here, a slight modification of the sensor can extend the operating temperature range up to 700(C. These pressure sensors will be fabricated with and without an amplifier. The sensor response will be characterized over a wide pressure and temperature range. Feasibility of microfabrication and integration using photomicrolithography will be explored. Direct mount pressure sensors for monitoring marine life is an objective of this research. Potential commercial applications of the novel pressure sensors include pressure sensors for : (1) monitoring life in deep sea, (2) oil well logging, (3) aerospace industry, (4) automotive manufacture, (5) pressure vessels, (6) chemical industry, and (7) general industrial use. ***
