*** 9760501 Deliwala There is a growing appreciation among biologists for high-resolution microscopy that can rapidly image three-dimensional biological samples of living tissue in real time without the need to slice the sample into thin cross-sectional sections. Science Research Laboratory proposes to develop a new method of optical microscopy, coherent nonlinear microscopy (CONM), that is based on sample illumination by a series of femtosecond laser pulses. CONM combines high resolution (better than 80 nm) with rapid three-dimensional imaging and no requirement for oil or water immersion. The capability to rapidly produce a high-resolution nonlinear image represents a major improvement over both scanning confocal microscopy and the scanning interference microscope. Phase I will demonstrate the soundness of the new microscopy concept, while Phase 11 will be a proof of principle that will be based on a working laboratory prototype. With its capability to perform real-time, high-resolution imaging, an instrument based on coherent nonlinear microscopy will find numerous applications in the three-dimensional biological imaging of living tissue, such as genes and neurons, thereby providing a new technique that will enhance genetic mapping and allow cell structure to be monitored in real time. Additional commercial applications include the rapid measurement of critical dimensions of microlithographic wafers and mask inspection for lithography. ***