ABSTRACT EEC-9802218 ROSE This planning award funds the Rensselaer Polytechnic Institute to hold an industry/university meeting to determine the feasibility and viability of the university becoming a research site associated with the University of Arizona's Industry/University Cooperative Research Center for Microcontamination and Defect Control. Research projects envisioned to augment the Center's research agenda are 1) Spectroscopic Ellipsometry Studies of Interfaces, 2) Defect Control during CMP, 3) Tracking Particulates in a PECVD Reactor, 4) Ultrapurification of Hydrofluric Acid Etching Solutions using Membrane Based Reprocessor, 5) Post-CMP Cleaning, 6) Defect Analysis for Improved BEOL Yield Modeling, 7) Control of Plasma Process-Induced Particle Formation, and 8) Defect Characterization of CMP Surfaces using Lateral Force Microscope. The Principal Investigator and his colleagues are recognized experts in their fields and are well qualified to run this planning grant.
