ABSTRACT EEC-9813014 Niesz/Rutgers This is an exploratory research project to augment the Industry/University Cooperative Research Center for Ceramics Research. It is planned to develop a fundamental scientific and engineering understanding of fine surface finishing of advanced ceramic material using chemically modified polishing environments. The objective is to improve surface finish quality, minimize surface and subsurface damage, and increased rate of homogeneous material removal. Special emphasis will be on adhesion and abrasion. Polishing environment variables to be studied include polishing solution pH, electrolyte concentration, and abrasive materials. Other controlled polishing parameters will include temperature and energy input. Polishing media will include silica and titania, zirconia and ceria.
