Ewing Technology Associates, in collaboration with researchers at the University of Illinois at Urbana-Champaign, will develop inexpensive point sensors with important applications in environmental control systems, chemical process flows, and atmospheric monitoring. The technology to be investigated is that of a micro-discharge. Micro-discharges will be fabricated using Si-based IC fabrication technology. Because of their small dimensions, these devices can operate in novel regimes of pressure and excitation.
