This is an Exploratory Research Project to augment the Industry/University Cooperative Research Center for Engineering Tribology.
This joint project involves a study of the fundamental issues associated with chemical mechanical polishing. In particular, the research will develop fundamental relationships between a 'soft' and a 'hard' surface in the presence of fluids trapped at the interface. To be studied are asperity size, mechanical properties and geometric placement, and the influence of multiple pad liners structures on polishing characteristics. The research should lead to new strategies for polishing and for the development of polishing machines.
