The proposed research deals with developing tools for the design of suspended micromechanical systems. A Schematic design methodology is to be devised which complements and builds upon existing design tools, chiefly commercial CAD packages that handle 3D visualization, finite-element analysis, macromodeling and simulation. The work includes: general design methodology; schematic design, including validation; identifying reusable components; generalized component interface; creating a set of lumped-parameter component models and design, fabrication and test of prototype components.
