Experimental program employing monoenergetic, low-energy beams of positrons to investigate the structural and electronic properties of multilayer heterostructures. The techniques of reemitted positron spectroscopy, positronium formation fraction, and Doppler broadening of annihilation radiation will be used in a depth profiling mode to study (1) positron transport, esp. effects at metal-Si and Si-silicide interfaces, (2) positron tunneling microscopy, and (3) thermalization of hot positrons and ground state formation in thin metal films.