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CAREER: Gas Phase Cleaning of Semiconductor Surfaces
Muscat, Anthony
University of Arizona, Tucson, AZ, United States
Search 4 grants from Anthony Muscat
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Abstract
Funding Agency
Agency
National Science Foundation (NSF)
Institute
Division of Materials Research (DMR)
Application #
9896121
Program Officer
LaVerne D. Hess
Project Start
Project End
Budget Start
2000-06-15
Budget End
2002-04-30
Support Year
Fiscal Year
1998
Total Cost
$335,150
Indirect Cost
Institution
Name
University of Arizona
Department
Type
DUNS #
City
Tucson
State
AZ
Country
United States
Zip Code
85721
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