Proposal Number: ECS-9631916 Principal Investigator: Charles Falco/University of Arizona Title: Advanced Multilayer Coatings in the Extreme Ultraviolet Abstract This research will develop techniques for producing new kinds of multilayer mirrors suitable for several applications in the extreme ultraviolet (EUV) wavelength region: projection lithography, soft x-ray microscopy, astronomy and lasers. The approach involves mirror formation by layer-by layer molecular beam epitaxy of materials combinations which is a substantial departure from the use of diffractive optics/zone plates. Interface roughness is the central problem for these short-wavelength multilayers; therefore emphasis is placed on characterizing and controlling roughness. transmission electron microscopy scanning tunneling microscopy atomic force microscopy and low angle x-ray diffraction experiments are planned to study how the interface roughness evolves from the substrate up through the multilayers. Reflectance high-energy electron diffraction and low-energy diffraction will be used in-situ to study the roughness evolution for the MBE-grown samples. Development of the multilayer mirror technique is a very flexible approach , which can be implemented widely for many applications.
