9420571 Babu ABSTRACT The goal of this proposal is to assist in the presentation, evaluation and dissemination of these underlying principles to undergraduate engineering students utilizing menu-driven, easily accessible, self-contained, interactive learning modules delivered in the CD-ROM format. Our task will be to cover a broad range of film structures, methods of deposition, and characterization techniques emphasizing our expertise and involving the student in as much experimental contact as possible. Our collective expertise also includes graphic simulation of film growth and thin film device performance as well as multimedia production and courseware development. The CD-ROM software will include a large number of progressively complex example case studies. Simulation is a powerful and visually appealing educational tool that can easily lend itself, using the still evolving multi-media format, to intensive exploration of many what-if scenarios concerning the theory, design and operation of these reactors as well as film and device configurations. Combining the study of the associated experimental techniques with that of computer simulations using transparent interfacing can sustain the interest of the user even over difficult-to-learn segments of the proposed modules. ***
