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Modeling of 3-D Diffraction and Scattering from Submicron Objects on Silicon for Particulate Monitoring and Photolithography
Wojcik, Gregory
Weidlinger Associates Inc, New York, NY, United States
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Abstract
Funding Agency
Agency
National Science Foundation (NSF)
Institute
Division of Industrial Innovation and Partnerships (IIP)
Type
Standard Grant (Standard)
Application #
8560204
Program Officer
Ritchie B. Coryell
Project Start
Project End
Budget Start
1986-02-01
Budget End
1986-07-31
Support Year
Fiscal Year
1985
Total Cost
$39,894
Indirect Cost
Institution
Name
Weidlinger Associates Inc
Department
Type
DUNS #
City
New York
State
NY
Country
United States
Zip Code
10014
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